Wafer Carrying Systems

Protos® Carrier MA Series

Protos® Carrier MA Series

Wafer Case for One Piece

Part NumberMA-12/ONE-SP (Separate Type Blue Clip)
MA-12/ONE-FX (Fixation Type Black Clip)
FeatureSingle 12 inch wafer can be fed safely. Clean and low outgassing grade conductive material (ST-poly) is used for contamination concern. 8 inch wafer can be held with optional vacuum molded tray.
Surface Resistivity1×106Ω/□ or less
MaterialConductive Polycarbonate

Wafer Carrying Case

Part NumberMA-5 (5inch carrier)
MA-6 (6inch carrier)
MA-6S(6inch slim carrier)
MA-8 (8inch carrier)
MA-8S(8inch slim carrier)
MA-12 (12inch carrier)
FeatureDouble-wall construction provides excellent impact resistance while wafers are firmly protected inside.
Can be used by automatic wafer loading equipment (robots).
A 3.5 inch floppy disk for data can be stored under the lid. (8 inches only)
The lid and body are supplied as a set, which opens and closes by turning the lid.
Partial filling acceptable.
Surface Resistivity1×106Ω/□ or less
MaterialConductive Polypropylene

Main Dimension

Part NumberWafer DiameterH(mm)h(mm)D(mm)A(mm)
MA-55 inch9050128±1150
MA-66 inch9050153±1175
MA-6S6 inch slim6338153±1175
MA-88 inch10354203±1226
MA-8S8 inch slim6538203±1226
MA-1212 inch7644302±1328

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