Wafer Carrying Systems

Protos® Cushion

Protos® Cushion

Cushion Material

PU Type (Anti-Static)

Part Number MA-4U-5/10/15/20 (for 4 inch)
MA-5U-5/10/15/20 (for 5 inch)
MA-6U-5/10/15/20 (for 6 inch)
MA-8U-5/10/15/20 (for 8 inch)
MA-12U-5/10/15/20 (for 12 inch)
FeatureShock Absorbing Anti-Static Cushion
Surface Resistant Value8×1011Ω/□ or less (22°C, 40%RH)
StandardAvailable with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm
MaterialAnti-Static Polyurethane

PE Type (Conductive)

Part NumberMA-4PESD-1/3/5/10 (for 4 inch)
MA-5PESD-1/3/5/10(for 5 inch)
MA-6PESD-1/3/5/10(for 6 inch)
MA-8PESD-1/3/5/10(for 8 inch)
MA-12PESD-1/3/5/10(for 12 inch)
FeatureShock absorbing, low ion contamination conductive cushion
Surface Resistant Value1×106Ω/□ or less (22°C, 40%RH)
StandardAvailable with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm
MaterialConductive Polyethylene

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