Wafer Carrying Systems

Protos Spacer

Protos Spacer

Achilles has developped the spacer securely protecting silicon wafers during transportaion, taking advantage of both Achilles's clean technology and special processing technology.

PEA Type

Part NameProtos Spacer PEA Type
Part NumberPEA-4-350
PEA-5-350
PEA-6-350
PEA-8-350
PEA-12-350
FeatureThis is new type antistatic spacer with low particle counts
and low ion contamination.
Surface
Resistivity
less than 1 x 1012ohm
StandardSheet thickness: 100um, with height of emboss 350um
MaterialAnti-static Polyethylene

CPS Type

Part NameProtos Spacer CPS Type
Part NumberCPS-4-250
CPS-5-250
CPS-6-250
CPS-8-250
CPS-12-250
FeatureThis is new type conductive spacer with low particle counts and low ion contamination.
Surface
Resistivity
less than 1 x 109ohm
StandardSheet thickness: 100um, with height of emboss 250mm
MaterialConductive Polyethylene

MA Type

Part NameProtos Spacer MA Type
Part NumberMA-4-65/100N/120/230
MA-5-65/100N/120/230
MA-6-65/100N/120/230
MA-8-65/100N/120/230
MA-12-65/100N/120/230
FeatureA conductive sheet that uses our ST-Fiber that produces little debris. Feasible design for automated handling design.
Surface
Resistivity
1 x 106ohm/sqr or less
StandardAvailable with 3 sheet thicknesses: 50um, 100um, 200um
MaterialConductive Olefin Resin

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